Surface-Finish Measuring Device

The article deals with the physical model and technical feasibility of the device for measuring the number of monolayers of gas sorbed on the surfaces under study and considered as contamination at the molecular level. The number of monolayers is determined by the breakaway force of the two polished plates relative to each other from the static contact position. We point out that this force depends on the interaction energy of sorbate molecules with the surface of the plates. The paper gives the structural scheme of the surface-finish measuring device, the principle of its operation, the expected diagrams of signals from the sensor recorded by the measuring unit, and the appearance of the sensor model. The correlation between the surface sorbate coating coefficient and factors of the working medium, pressure above the surface, temperature and humidity is confirmed by experimentally obtained graphs, which indicates the working suitability of the proposed method for surface-finish measurement

References

[1] Kragelskiy I.V., Dobychin M.N., Kombalov V.S. Osnovy raschetov na trenie i iznos [Basic calculations of friction and wearing]. Moscow, Mashinostroenie Publ., 1977. 526 p.

[2] Rozanov L.N. Vakuumnaya tekhnika [Vacuum technique]. Moscow, Vysshaya shkola Publ., 1990. 320 p.

[3] Jones J.E. On the determination of molecular fields. I. From the variation of the viscosity of a gas with temperature. Proc. R. Soc. Lond. A., 1924, vol. 106, no. 738, pp. 441–462. DOI: 10.1098/rspa.1924.0081Available at: http://rspa.royalsocietypublishing.org/content/106/738/441

[4] Dushman S., Lafferty J.M. Scientific foundations of vacuum technique. John Wiley & Sons, 1962. 808 p.

[5] Deulin E.A., Gatsenko A.A., Loginov B.A. Friction force of smooth surfaces of SiO2–SiO2 as a function of residual pressure. Surface Science, 1999, vol. 433-435, pp. 288–292. DOI: 10.1016/S0039-6028(99)00152-1Available at: https://www.sciencedirect.com/science/article/pii/S0039602899001521

[6] Gladyshev I.V. Residual pressure and temperature influence on SiO2–SiO2 friction coefficient. Proc. Nordtrib 2002. Keynotes and Abstracts, 2000. 176 p.

[7] Nevshupa R.A. Povyshenie nadezhnosti vysokovakuumnykh mekhanizmov na osnove ucheta vliyaniya obezgazhivayushchego progreva. Avtoref. diss. kand. tekhn. nauk [Reliability raising of high-vacuum mechanisms taking into account effect of degasifying warming-up. Abs. kand. tech. sci. diss.]. Moscow, 1999. 16 p. (in Russ.).

[8] Polyakov V.B., Arutyunyan Z.R., Deulin E.A. Datchik chistoty poverkhnosti plastin [Surface roughness sensor for plates]. Patent RU 2617891. Appl. 20.02.2016, publ. 28.04.2017. Bull. no. 13.