All articles by "Makarchuk V.V. "
Investigation of the characteristics of energy sources for intelligent environments
Authors: Zinchenko L.A., Makarchuk V.V. , Maslov A.E. | Published: 12.10.2016 |
Published in issue: #5(110)/2016 | |
DOI: 10.18698/0236-3933-2016-5-51-60 | |
Category: Informatics, Computer Engineering and Control | Chapter: Elements and Devices of Computer Engineering and Control Systems | |
Keywords: intelligent environments, distributed micro-electro-mechanical systems (MEMS), piezoelectric effect, finite element method |
Polynomial Model of Chemical-Mechanical Planarization in Production of Sub-Micrometer VLSIC
Authors: Amirkhanov A.V. , Gladkikh A.A. , Makarchuk V.V. , Pshennikov A.G. , Shakhnov V.A. | Published: 09.09.2013 |
Published in issue: #2(87)/2012 | |
DOI: | |
Category: Design and technology | |
Keywords: chemical-mechanical planarization, crystal, interlayer insulation, multilevel metallization, planarization range, yield, topology, convolution, polynomial |