Search by keyword: "thin films"
Development of Manufacturing Technology of Photo-Dielectric Sensitive Element of Ultraviolet Range on the Basis of Thin Films of Zinc Oxide
| Authors: Shashin D.E., Sushentsov N.I. | Published: 16.12.2019 |
| Published in issue: #6(129)/2019 | |
| DOI: 10.18698/0236-3933-2019-6-99-109 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Design and Instrument Engineering Technology and Electronic Equipment | |
| Keywords: photodielectric effect, ultraviolet radiation, thin films, zinc oxide, magnetron sputtering | |
Direct Process Control of Thin Film Synthesis During Production of Very-Large-Scale Integrated Circuits
| Authors: Obraztsov D.V., Chernyshov V.N., Shakhnov V.A. | Published: 28.11.2017 |
| Published in issue: #6(117)/2017 | |
| DOI: 10.18698/0236-3933-2017-6-17-27 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Design and Instrument Engineering Technology and Electronic Equipment | |
| Keywords: thin films, vacuum deposition, direct control, production, very-large-scale integrated circuit | |
Error Estimation of Measuring Multilayer Film Coating Thickness by Spectral Reflectometry Method
| Authors: Tsepulin V.G., Tolstoguzov V.L., Stepanov R.O., Karasik V.Ye. | Published: 28.05.2017 |
| Published in issue: #3(114)/2017 | |
| DOI: 10.18698/0236-3933-2017-3-4-12 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Instrumentation and Methods to Control Environment, Substances, Materials, and Products | |
| Keywords: multilayer film structures, reflectometry, profilometry, thin films, thickness measurement errors | |
Тhickness Distribution Measurement of Multilayer Film Structures by Spectral Reflectometry Methods
| Authors: Tsepulin V.G., Tolstoguzov V.L., Karasik V.Ye., Perchik A.V., Arefev A.P. | Published: 15.06.2016 |
| Published in issue: #3(108)/2016 | |
| DOI: 10.18698/0236-3933-2016-3-3-12 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Instruments and Measuring Methods | |
| Keywords: multilayer film structures, reflectometry, profilometry, acousto-optical filter, thin films | |