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Получение пленок серебра методом электронно-лучевого испарения…
ISSN 0236-3933. Вестник МГТУ им. Н.Э. Баумана. Сер. Приборостроение. 2016. № 6
13
Abstract
Keywords
Currently a wide interest has been shown to improving the
optical properties of metal thin films for application in na-
nooptics and nanoplasmonics. One of the minimizing losses
methods in plasmonics is usage of quasi singlecrystilline thin
film instead polycrystalline thin films. This paper tested the
problem of quasi singlecrystilline continuous silver thin films
formation with a high aspect ratio of the crystallite size to the
film thickness. First, we did the growth mechanisms analysis
and chose a substrate for the growth of quasi singlecrystilline
film. The article shows the experimental data and SEM imag-
es of deposited films. Then we classified three regions
of growth depending on the evaporated material ratio and
"film — substrate" energy system and found the main crys-
talline size correlations with the deposition rate and the
substrate temperature. Finally, 200 nm thick continuous
monocrystalline silver film with an aspect ratio of 7:1 and a
surface roughness of about 1 nm was deposited
Silver thin film, single crystal,
plasmonics, growth models, elec-
tron beam evaporation
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