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А.С. Бабурин, А.Р. Габидуллин, А.В. Зверев

14

ISSN 0236-3933. Вестник МГТУ им. Н.Э. Баумана. Сер. Приборостроение. 2016. № 6

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Chou B.-T., Lin Sh.-D., Huang B.-H., LuSingle T.-C. Crystalline silver film grown

on Si (100) substrate by using electron-gun evaporation and thermal treatment.

Journal

of Vacuum Science

&

Technology B

, 2014, vol. 32, no. 3, pp. 031209-1−031209-5.

DOI: 10.1116/1.4874618

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Moscow, Nauka Publ., 1980. 408 p.

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Lyutovich A.S. Ionno-aktivirovannaya kristallizatsiya plenok [Ion-activated films crystal-

lization]. Tashkent, Fan Publ., 1982. 148 p.

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Pinsker Z.G. Monokristallicheskie plenki [Single-crystalline films] Moscow, Mir Publ.,

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Baburin A.S.

— junior research scientist, All-Russia Research Institute of Automatics

(Suschevskaya ul. 22, Moscow, 127055 Russian Federation).

Gabidullin A.R

— assistant, All-Russia Research Institute of Automatics (Suschevskaya ul. 22,

Moscow, 127055 Russian Federation).

Zverev A.V.

— research scientist, All-Russia Research Institute of Automatics (Suschevskaya

ul. 22, Moscow, 127055 Russian Federation).

Rodionov

I.A.

— Cand. Sci. (Eng.), Director of the Scientific-Educational Center of Func-

tional Micro/Nanosystems, Bauman Moscow State Technical University (2-ya Baumanskaya

ul. 5, Moscow, 105005 Russian Federation).

Ryzhikov

I.A.

— Cand. Sci. (Eng.), Assoc. Professor, Head of laboratory of the Institute of

Theoretical and Applied Electrodynamics, Russian Academy of Sciences (Izhorskaya ul. 13,

Moscow, 125412 Russian Federation).

Panfilov Yu.V.

— Cand. Sci. (Eng.), Professor, Head of the Electronic Technology in Mechan-

ical Engineering Department, Bauman Moscow State Technical University (2-ya Baumanskaya

ul. 5, Moscow, 105005 Russian Federation).

Please cite this article in English as:

Baburin A.S., Gabidullin A.R., Zverev A.V., Rodionov I.A., Ryzhikov I.A., Panfilov Yu.V. Silver

Films Deposited by Electron-Beam Evaporation for Application in Nanoplasmonics.

Vestn. Mosk.

Gos. Tekh. Univ. im. N.E. Baumana, Priborostr.

[Herald of the Bauman Moscow State Tech. Univ.,

Instrum. Eng.], 2016, no. 6, pp. 4–14. DOI: 10.18698/0236-3933-2016-6-4-14